Single chamber processing

proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 by European Materials Research Society. Meeting

Publisher: North-Holland in Amsterdam, New York

Written in English
Cover of: Single chamber processing | European Materials Research Society. Meeting
Published: Pages: 162 Downloads: 601
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Subjects:

  • Semiconductors -- Design and construction -- Congresses.,
  • Vacuum technology -- Congresses.

Edition Notes

Includes bibliographical references.

Statementedited by Yves I. Nissim, Avishay Katz.
SeriesEuropean Materials Research Society symposia proceedings ;, v. 37
ContributionsNissim, Yves I., 1953-, Katz, Avishay.
Classifications
LC ClassificationsTK7871.85 .E87 1992
The Physical Object
Paginationx, 162 p. :
Number of Pages162
ID Numbers
Open LibraryOL1737421M
ISBN 100444899154
LC Control Number92042556

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